Electronic Conductivity in a Р+-Ion Implanted Positive Photoresist
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Russian Microelectronics
سال: 2020
ISSN: 1063-7397,1608-3415
DOI: 10.1134/s1063739719060076